Linear Feedthrough
This is a linear feedthrough to introduce linear motion into equipment installed in vacuum. It can be used in ultra-high vacuum range up to 10-8Pa.
Components
Features
- All-metal and capable of hard baking, suitable for ultra-high vacuum systems.
- This is a bellows type linear feedthrough, with the vacuum side and the air side completely separated by a bellows.
- Introduces linear motion into vacuum by using the expansion and contraction of the bellows, preventing the leaks during operation.
Specifications
| Type | Name | Drive system | Connection flange |
Linear movement |
Allowable maximum thrust |
Allowable heating temperature |
Weight | Backlash |
|---|---|---|---|---|---|---|---|---|
| 954-7621 | Linear motion drive | Bellows translatory movement | φ70ICF | 20mm | 196N | 300℃ | 0.6kg | ±0.5mm or less |
| 954-7622 | Linear motion drive | ↑ | φ70ICF | 40mm | 196N | 300℃ | 0.7kg | |
| 954-7623 | Mini linear motion drive | ↑ | φ34ICF | 20mm | 147N | 300℃ | 0.48kg | |
| 954-7626 | Mini linear motion drive | ↑ | φ34ICF | 25mm | 147N | 200℃ | 0.9kg | ±0.3mm or less |
| 954-7627 | Mini linear motion drive | ↑ | φ34ICF | 40mm | 147N | 200℃ | 1.1kg |
Other common specifications
- Leak: 1.3×10-11Pa·m3/sec or less