Quadrupole Mass Spectrometer(transducer type) M-070QA-TDF, M-101QA-TDF, M-101/201QA-TDM | Quadrupole Mass Spectrometers
M-070QA-TDF, M-101QA-TDF, M-101/201QA-TDM
M-101QA-TDF and M-101/201QA-TDM are highly sensitive and functional quadrupole mass spectrometers with low gas emission that are exclusively designed to be controlled from a PC.
M-070QA-TDF is a low-cost version that is suitable for residual gas monitoring of various vacuum equipment.
Components
Features
- High-sensitivity
- Uses secondary-emission electron multiplier tube for detector (M-101/201QA-TDM)
- Low gas emission analyzer tube
- Uses low gas emission ion source
- Provides degassing function (*1)
- Excellent basic performance - Supporting advanced analysis -
- Enables detailed setting of ionization voltage and emission current (*1)
- Wide dynamic range
*1: Excluding M-070QA-TDF.
Applications
Residual gas monitors, vacuum monitor for accelerators, inorganic gas analysis, thermal desorption gas analysis.
Specifications
| Model | Standard model | High-sensitivity model | ||||
|---|---|---|---|---|---|---|
| M-070QA-TDF | M-101QA-TDF | M-101QA-TDM | M-201QA-TDM | |||
| Basic performance |
Measurement weight range |
1 to 70amu | 1 to 100amu | 1 to 100amu | 1 to 200amu | |
| Resolution | M/ΔM≧2M | |||||
| Sensitivity (N2) |
FC | 1.5×10-6A/Pa or greater | 7.0×10-6A/Pa or greater | - | - | |
| SEM | - | 2.5A/Pa or greater | 1.8A/Pa or greater | |||
| Minimum detected partial pressure |
6.7×10-9Pa or less | 5.0×10-10Pa or less | 1.0×10-12Pa or less | 1.0×10-12Pa or less | ||
| Operating pressure | 1.3×10-2Pa or less | |||||
| Dynamic range | 6 digits | 7 digits | ||||
| Specifications | Detector | FC | ◯ | ◯ | ◯ | ◯ |
| EM | - | ◯ | ◯ | |||
| Ion source | Cage type | Cage type (Option: box type*1) | ||||
| Filament | Yttria coated iridium×2 | Yttria coated iridium×2 Option: Tungsten*1 |
||||
| Baking temperature | 250℃(Analyzer tube only) | |||||
| Degas function | - | Electron bombardment | ||||
| Connection flange | φ70ICF | |||||
| Rated input voltage | 100V to 240VAC | |||||
| Maximum power consumption |
60W | 90W | ||||
| Weight | Analyzer tube |
1.5kg | 1.4kg | 1.6kg | ||
| Controller | 2.1kg | 2.2kg | ||||
| Communication interface | RS-232C/485 | |||||
| Standard software | QUADVISION | |||||
| Conformity | CE marking, RoHS | |||||
*1. Please contact us for specifications of options.