Combination Pump

Combination pump combines the titanium sublimation pump with the triode ion pump (noble pump) to economically increase pumping speed while maintaining the feature of ion pump which can easily obtain clean ultra-high vacuum.

Components

Features

  1. Increased pumping speed
    Compared to ion pump, the cost (including cost of control equipment) per pumping speed 1L/s is approximately 1/2 to 1/3.
  2. Light weight and compact
    Compared to ion pump with the same pumping speed, the volume and weight are reduced to 1/5 to 1/10. Therefore, it can be easily attached/removed to/from the pumped system to achieve high pumping speed with minimum space.

Applications

Deposition apparatus, electron microscopes, mass spectrometers, vacuum furnaces, various analysis equipment, experimental equipment, pumping equipment and other ultra-high vacuum systems with large gas discharge.

Specifications

400L/s Combination Pump

Pumping rate/Pumping flow See Fig. 1
Operating pressure range 10-1Pa to 10-9Pa
Baking temperature MAX250℃
Weight Approx. 15kg
Intake flange φ152ICF flange
Approximate capacity 4.5L
Applicable controller 922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller

800L/s Combination Pump

Pumping rate/Pumping flow See Fig. 2
Operating pressure range 10-1Pa to 10-9Pa
Baking temperature MAX 250℃
Weight Approx. 25kg
Intake flange φ203ICF flange
Approximate capacity Approx. 7.5L
Applicable controller 922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller

1600L/s Combination Pump

Pumping rate/Pumping flow See Fig. 3
Operating pressure range 10-1Pa to 10-9Pa
Baking temperature MAX 250℃
Weight Approx. 35kg
Intake flange Inlet flange φ253ICF flange
Approximate capacity Approx. 15.5L
Applicable controller 922-9119 Sublimation Pump Controller and PIC-052NP 20/60L/s Noble Pump Controller

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