POWER Eco Series Cryo Pump

The POWER Eco series cryo pump is a high-performance energy saving cryo pump designed to reduce power consumption and cooling water flow.
POWER Eco Series Cryo Pump High performance energy-saving cryo pump with 8- to 22-inch intake diameter

Components

Features

  1. Energy and resource saving
    Power consumption and cooling water reduced by 15 to 70%
  2. Reduced regeneration/startup time
    Less than half of previous product. (compared with our previous product)
  3. Improved pumping performance
    Substantial argon pumping capacity increased 1.5 to 4 times. (compared with our previous product)

Applications

  • Semiconductor manufacturing equipment (sputtering equipment, ion implantation equipment)
  • Electronic component manufacturing equipment
  • Vacuum evaporation systems
  • Vacuum furnaces, space chambers
  • Accelerators
  • Various high vacuum equipment

Specifications

Pump Type P-085C P-086C P-086CL P-087C P-106C P-106CL P-126C P-126CL P-127C Remarks
Diameter 8 inch 8 inch 8 inch 8 inch 10 inch 10 inch 12 inch 12 inch 12inch
Shape Vertical Vertical Horizontal Vertical Vertical Horizontal Vertical Horizontal Vertical  
Pumping
speed
(L/S)		 Nitrogen 1,500 1,500 1,500 1,500 2,400 2,400 4,000 4,000 4,000  
Argon 1,300 1,300 1,300 1,300 2,000 2,000 3,200 3,200 3,200  
Hydrogen 1,000 2,500 2,200 1,000 3,800 3,700 6,000 6,000 3,000  
Water 4,000 4,000 4,000 4,000 6,400 6,400 9,000 9,000 9,000  
Maximum pumping
flow (Pa·m3/s)		 1.2 1.2 1.1 1.2 1.0 1.0 0.8 0.8 0.8  
Maximum gas
instantaneous
tolerance (Pa·m3)		 18.0 18.0 18.0 18.0 18.0 18.0 18.0 18.0 18.0  
Startup time (min) 60 65 80 60 85 100 95 105 70 *1
Regeneration
(heat-up)
time (min)		 40 40 45 40 45 50 45 50 40 *1
Startup
regeneration
time (min)		 100+α 105+α 125+α 100+α 130+α 150+α 140+α 155+α 110+α *1
Pumping
capacity
(Pa·m3)		 Argon 80,000 80,000 80,000 150,000 160,000 140,000 260,000 200,000 400,000 *2
Hydrogen 1,300 1,800 1,600 1,300 2,000 1,800 2,400 2,200 1,600  
Ultimate
temperature(K)		 15 or less  
Ultimate
pressure(Pa)		 Approx. 10-7  
Maximum heating
temperature(℃)		 70  
Ambient
temperature
range(℃)		 10 to 35  
Recommended
maintenance
interval(h)		 Within 16,000h  
Weight (kg) 22 22 22 23 24 25 29 30 29  
Number
of
operable
units		 P-421CA 3* 3* 3* 3* 2* 2* 2* 2* 2* *3,*4
P-875CA 5 5 5 5 4 4 4 4 4 *3
Pump Type P-128C P-128CL P-160C P-161C P-161CL P-166C P-201C P-206C P-226C Remarks
Diameter 12 inch 12 inch 16 inch 16 inch 16 inch 16 inch 20 inch 20 inch 22 inch
Shape Vertical Horizontal Vertical Vertical Horizontal Vertical Vertical Vertical Vertical  
Pumping
speed
(L/S)		 Nitrogen 4,000 4,000 8,000 8,000 7,400 8,000 13,000 13,000 17,000  
Argon 3,200 3,200 5,500 5,500 5,000 5,500 9,000 9,000 11,000  
Hydrogen 6,000 5,000 5,500 11,000 10,000 11,000 17,000 17,000 23,000  
Water 9,000 9,000 17,000 17,000 17,000 17,000 28,000 28,000 39,000  
Maximum pumping
flow (Pa·m3/s)		 2.2 2.2 2.2 2.0 2.2 3.5 1.3 3.0 2.7  
Maximum gas
instantaneous
tolerance (Pa·m3)		 40 40 50 50 50 50 80 80 133  
Startup time (min) 110 115 70 90 120 80 150 100 120 *1
Regeneration
(heat-up)
time (min)		 70 70 40 60 60 60 70 80 80 *1
Startup
regeneration
time(min)		 180+α 185+α 110+α 150+α 180+α 140+α 220+α 180+α 200+α *1
Pumping
capacity
(Pa·m3)		 Argon 270,000 200,000 400,000 400,000 200,000 400,000 800,000 800,000 1,000,000 *2
Hydrogen 4,000 3,500 1,600 3,400 3,000 3,400 4,500 7,500 7,500  
Ultimate
temperature(K)		 15 or less  
Ultimate
pressure(Pa)		 Approx. 10-7  
Maximum heating
temperature(℃)		 70  
Ambient
temperature
range(℃)		 10 to 35  
Recommended
maintenance
interval(h)		 Within 16,000h  
Weight(kg) 33 34 50 50 65 50 60 60 87  
Number
of
operable
units		 P-421CA 1 1 1 1 1 - 1 - - *4
P-875CA 2 2 2 2 2 1 2 1 1 *3

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