Pirani Gauge (corrosion-resistant type) M-351PG
This is a model using Ni filament to increase corrosion resistance. It supports hard process equipment such as RIE and CVD.
Components
Features
- Improved corrosion resistance
Uses Ni filament - Good repeatability and low cost
- From 5×10-2Pa to atmospheric pressure
Applications
- Semiconductor and electronic device manufacturing equipment
Dry etching equipment, plasma CVD equipment, LD-CVD equipment - Food and drug manufacturing equipment
Vacuum-freeze drying, reduced-pressure distillation, sterilization equipment
Specifications
| Type | M-351PG-SP (Ni filament) (Setpoint equipped type) |
|---|---|
| Measurement pressure range | 5×10-2 to 1×105(Pa) |
| Accuracy (Pa) | ±50%: 5×10-2 to 1×10-1 ±15%: 1×10-1 to 1×104 ±50%: 1×104 to 1×105 |
| Repeatability | ±2%: 1×10-1 to 1×104Pa |
| Input voltage | +14 to 30VDC |
| Power consumption | 2W |
| Analog output | 0 to 10V |
| Gauge identification resistance | 13KΩ (between D-sub 5 and 9 pin) |
| Set point | 2 contact output (1A 30V, DC) |
| Interface | - |
| I/O connector | D-sub 9 pin |
| Maximum cable length | 200m (0.34mm2) supported*1 |
| Operating temperature range | 5 to 60℃ |
| Storage temperature range | -20 to 70℃ (not operating) |
| Baking temperature | <+150℃ (O ring specification, gauge head only) <+300℃ (metal seal specification, gauge head only) |
| Allowed overload pressure | 1MPa (limited to joint shape, inert gas, absolute temperature) |
| Applicable Pirani Sensor Type | MP-2 |
| Flange shape | NW16, NW25, 1/8NPT |
| Sensor material (main component) |
Pirani filament: Nickel Sensor tube: Stainless steel Inlet terminal insulator: Koval glass+Al2O3 coated |
| Conformity | CE marking, RoHS, IP40 |
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0160-08359 | M-351PG-SP/N16 | Pirani Gauge | Nickel Filament | 22665 |
| 0160-08854 | M-351PG-SP/N25 | Pirani Gauge | Nickel Filament | 22666 |
| 0161-62080 | MP-2/NW16 | Pirani Gauge Head | Nickel Filament | 22668 |
| 0161-70368 | MP-2/NW25 | Pirani Gauge Head | Nickel Filament | 22669 |