Wide Range Ionization Vacuum Gauge M-833HG
M-833HG is a control unit made exclusively for miniature B-A gauges. Optional expansion boards supporting versatile gauge and data output are available. The combination of miniature B-A gauge and TC gauge (option) and the use of auto filament that performs auto gauge switching enables highly accurate vacuum measurement from atmospheric pressure to ultra-high vacuum. Best suited for installation on high to ultra-high vacuum equipment.
Components
Features
- Variety of external control functions enabling fully remote operation.
- Standard equipped with two set points.
- Highly expandable supporting up to four option boards. (Note: GP-IB option not supported.)
- Conformity with CE marking and RoHS
Applications
- Automated vacuum equipment pressure measurement
- Sputtering process pressure measurement and control
- Multi-chamber system pressure measurement
- General vacuum equipment pressure measurement
Specifications
| Type | M-833HG | |
|---|---|---|
| Measurement ball | Miniature gauge MG-2 Series | |
| Pressure display range | 0.1×10-7 to 1.32×101 Pa ※1 | |
| Pressure display | Measurement range auto switch | |
| Set point | Standard equipped with 2 points (open collector) | |
| D/A output | 0 to 10V: Mantissa output, Exponent output 0 to 11V: Combined output or Log output |
|
| Analog output (Electron meter output) |
When set to APC mode (0.1 to 2.5V) When set to normal mode (0.1 to 1.6V) |
|
| External control function (Remote control) |
INPUT | Filament ON/OFF Degas ON/OFF etc. (6 types of external control functions) |
| OUTPUT | 6 types of status signal output | |
| Special function | APC compatible: Range hold function Electron meter output function |
|
| Dimensions and Weight | H99×W209×D330, 1.9kg (When no option boards are installed) | |
| Power requirements | 100 to 240VAC ※2 100VA or less, 50/60Hz |
|
| Emission current | 10μA, 100μA, 1mA auto switched or fixed | |
| Degas | Grid electrical heating method | |
| Filament switching | Key and remote I/O control | |
| Filament protection | Over range setting or emission current ±50% variation | |
| Standard configuration | Vacuum gauge main unit (measurement ball and cables not included) | |
| Conformity | CE marking, RoHS | |
※1 About the measurement range, please refer to a section of miniature gauge MG-2.
※2 The cable included with the M-833HG is for use at 100V. Please contact us when using at 200V.
Dimensions
Parts Number
| Parts Number | Model | Description | Remarks | Code |
|---|---|---|---|---|
| 0161-63816 | M-833HG | Wide Range Ion Gauge | Controller for Miniature Gauge only, w/o Cable / Gauge Head | 21734 |
| 0161-68604 | 722-TC | TC Gauge Board | 21487 | |
| 0161-70465 | 722-BCD | BCD Output Board | for M-722HG/M-822HG/M-922HG w Connecter | 21483 |
| 0161-70423 | 722-CM | CM.XTL Gauge Board | for M-722HG/M-822HG/M-922HG w Connecter | 21483 |
| P23-04131 | 722-SPB | Set Points Board | for M-722HG/M-822HG/M-922HG w Connecter | 21480 |
| H21-02971 | 722-232C | RS-232C Board | for M-722HG/M-822HG/M-922HG w Connecter | 21487 |
| H21-02966 | 722-GPIB | RS-232C Board | for M-722HG/M-822HG/M-922HG w/o Cable | 21484 |
| P23-01064 | 831-323 | Gauge Selector Box for MG-2 | for M-832HG, w Cable (to Unit 5M, to Gauge 2M) | 21775 |
| H21-03430 | 430-901 | Cable for Miniature B-A Gauge (5M) | for MG-2/2F, Standard Cable | 21672 |
| H21-03432 | 430-902 | Cable for Miniature B-A Gauge (10M) | for MG-2/2F | 21673 |
| H21-03433 | 430-903 | Cable for Miniature B-A Gauge (15M) | for MG-2/2F | 21674 |
| 0161-24189 | 430-904 | Cable for Miniature B-A Gauge (20M) | for MG-2/2F | 21675 |
| 0161-44820 | 430-911 | Bakable Cable for MG-2 (5M) | Maximum Usable Temperature Range 250ﾟC | 21676 |
| 0161-44838 | 430-912 | Bakable Cable for MG-2 (10M) | Maximum Usable Temperature Range 250ﾟC | 21677 |
| 0161-36966 | 430-913 | Bakable Cable for MG-2 (15M) | Maximum Usable Temperature Range 250ﾟC | 21678 |
| 0161-36974 | 430-914 | Bakable Cable for MG-2 (20M) | Maximum Usable Temperature Range 250ﾟC | 21679 |