PVD Equipment for Electronic Component Production EC7400
EC7400 is PVD equipment for electronic device production with a high-quality space-saving design which is the result of our experiences in semiconductor and disk manufacturing equipment.
It is a fully automated cluster type equipment that can accommodate a variety of process modules.
Information
Electronic component production
- Standard equipped with cassette chamber and transfer chamber (C to C specification)
- Delivers excellent deposition distribution
- Able to accommodate a variety of process modules according to usage
- Provides high target utilization with rotary magnetron cathode
- System configuration:Cluster type (up to three process chambers)
C to C type - Substrate size:φ200mm maximum
- Cathode:φ7.1" cathode (Up to 4. Varies depending on the module.)
- Modules:Offset rotary sputtering module (multi-cathode specification)
Offset rotary and revolutionary sputtering module
Etching module (preprocessing)
Preheating module (preprocessing)