Inline Type PVD Equipment for Electronic Component Production EL3200
EL3200 is horizontal inline type PBC equipment capable of single layer deposition and multi-layer deposition (up to 3 layers) by transporting square tray one by one to the deposition area.
Information
Electronic component production
- Selectable between single-side sputtering (depo UP or depo DOWN) and both-sides sputtering according to production volume
- Supports laminated films by using up to 3 (single side) cathodes
- Can accommodate up to 25 trays in the stocker chamber
- Pre-heating chamber (preprocessing) can be expanded (Option)
- System configuration:Horizontal inline type
- Substrate size:Effective deposition area 300mm×450mm
- Cathode:5"×16" cathode×3 (single side)