MRAM Etching Equipment NC8000
NC8000 is Ion Beam Etching Equipment for Multi stacked MRAM element, which has difficulty in current RIE etching process.
High etching performance and high productivity is realized.
Information
MRAM volume manufacturing
- Good uniformity and high productivity by large diameter grid
- Overall etching process by clampless holder with 2 axes of revolution and stage angle
- Optical End Point detection system (OES) for MRAM multi stacked structure
- System configuration:Cluster type
- Substrate size:φ300mm