Milling→Insulator→HARD Bias→Cap Layer Integrated Manufacturing Equipment HC7300
Effectively consolidates magnetic head production processes.
This is integrated magnetic HEAD production equipment only possible with Canon ANELVA product lineup.
Information
Magnetic head production
- Delivers integrated processing from PR-on-TMR state to cap layer formation through milling and various types of deposition.
- Provides optimum module lineup to enable optimum processing shape required by each element.
(e.g. IBE, anisotropic sputtering, isotropic sputtering, RIE) - Delivers excellent deposition characteristic and high productivity through integrated vacuum process.
- System configuration:Cluster type
- Substrate size:φ150mm, φ200mm